@article{cf7971f47204435ea861c10b55f9dd9e,
title = "Significant shear mode softening in a c-axis tilt nanostructured hexagonal thin film induced by a self-shadowing effect",
abstract = "The mechanical properties of tilted AlN fiber structure caused by self-shadowing are investigated using gigahertz vibration induced through the piezoelectricity of AlN itself. We observed significant shear elastic softening in a highly tilted fiber nanostructure, but only a slight decrease in compressive elasticity. Abnormal 1/4 wavelength thickness mode resonance, indicating the decrease in the shear acoustic wave velocity, is reproducibly observed. We attribute this phenomenon to the weak fiber-to-fiber connection seen in a cross-sectional scanning electron microscopy image.",
keywords = "Acoustic methods, Nanocrystalline microstructure, Piezoelectricity, Shear mechanical properties, Sputtering",
author = "T. Yanagitani and M. Suzuki",
note = "Funding Information: This research was partly supported by the Japan Society for the Promotion of Science Grant-in-Aid for Young Scientists (B) Number 24760075, the Japan Science and Technology Agency Number 241FT0207 (Adaptable & Seamless Technology Transfer Program through Target-driven R&D) and the Murata Science Foundation. Copyright: Copyright 2013 Elsevier B.V., All rights reserved.",
year = "2013",
month = nov,
doi = "10.1016/j.scriptamat.2013.08.011",
language = "English",
volume = "69",
pages = "724--727",
journal = "Scripta Materialia",
issn = "1359-6462",
publisher = "Elsevier Limited",
number = "10",
}