Significant shear mode softening in a c-axis tilt nanostructured hexagonal thin film induced by a self-shadowing effect

T. Yanagitani*, M. Suzuki

*この研究の対応する著者

研究成果: Article査読

8 被引用数 (Scopus)

抄録

The mechanical properties of tilted AlN fiber structure caused by self-shadowing are investigated using gigahertz vibration induced through the piezoelectricity of AlN itself. We observed significant shear elastic softening in a highly tilted fiber nanostructure, but only a slight decrease in compressive elasticity. Abnormal 1/4 wavelength thickness mode resonance, indicating the decrease in the shear acoustic wave velocity, is reproducibly observed. We attribute this phenomenon to the weak fiber-to-fiber connection seen in a cross-sectional scanning electron microscopy image.

本文言語English
ページ(範囲)724-727
ページ数4
ジャーナルScripta Materialia
69
10
DOI
出版ステータスPublished - 2013 11
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学
  • 金属および合金

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