Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

Energy harvester is a key device for realizing trillion sensors network society. Thermoelectric generator (TEG) is regarded as the ultimate energy harvester to provide semipermanent power from heat energies via Seebeck effect. The recent discovery of the superior thermoelectric (TE) property of silicon nanowires (Si-NWs) opens the way for Si-based TEGs. In this paper, a very simple device architecture of Si-based micro TEG is proposed. It can be fabricated by the CMOS-compatible process, and the TE power density is found to be scalable by miniaturizing and integrating the structure.

本文言語English
ホスト出版物のタイトルIMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai
出版社Institute of Electrical and Electronics Engineers Inc.
ページ22-23
ページ数2
ISBN(電子版)9781509039913
DOI
出版ステータスPublished - 2017 7 31
イベント15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017 - Kyoto, Japan
継続期間: 2017 6 292017 6 30

出版物シリーズ

名前IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai

Other

Other15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017
国/地域Japan
CityKyoto
Period17/6/2917/6/30

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料
  • 表面、皮膜および薄膜

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