Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

Jun Mizuno*, Kay Nottmeyer, Takashi Kobayashi, Kazuyuki Minami, Masayoshi Esashi

*この研究の対応する著者

研究成果: Paper査読

8 被引用数 (Scopus)

抄録

A silicon bulk micromachined accelerometer structure has been fabricated and characterized, that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear and up to two axes of angular acceleration can be measured. This combination has practical relevance for single-point sensing of the complete motion of e.g. a car body with a minimum number of sensors in applications like vehicle dynamic control or crash detection.

本文言語English
ページ1197-1200
ページ数4
出版ステータスPublished - 1997
外部発表はい
イベントProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
継続期間: 1997 6 161997 6 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • 工学(全般)

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