Silicon oxynitride waveguides for optoelectronic integrated circuits

Engineering & Materials Science

• Planar waveguides 100%
• Integrated optoelectronics 98%
• Waveguides 65%
• Silicon 50%
• Flow rate 48%
• Optical waveguides 47%
• Buffer layers 45%
• Refractive index 41%
• Ultraviolet radiation 41%
• Rate constants 39%
• Energy gap 36%
• Oxygen 25%
• Chemical analysis 20%

Physics & Astronomy

• oxynitrides 76%
• integrated circuits 60%
• flow velocity 51%
• waveguides 42%
• silicon 34%
• optical waveguides 31%
• buffers 27%
• wafers 24%
• refractivity 22%
• shift 19%
• oxygen 19%
• radiation 17%
• energy 9%