Simulation of electron/solid interaction and application to quantitative analysis by electron spectroscopies

S. Ichimura, Ze Jung Ding, R. Shimizu

研究成果: Conference article査読

2 被引用数 (Scopus)

抄録

The intensity of the measured spectrum, especially the Auger spectrum, is strongly affected by the contribution of backscattered electrons with high energy, since those energetic electrons can also excite Auger electrons at the surface. The aim of the present paper is to describe briefly how the energy distribution of backscattered electrons can be estimated and how the result can be applied for the quantitative analysis by electron spectroscopies, especially by AES.

本文言語English
ジャーナルSurface and Interface Analysis
12
1-12
出版ステータスPublished - 1988 7 1
外部発表はい
イベントProceedings of the European Conference on Applications of Surface and Interface Analysis, ECASIA 87 - Fellbach, West Ger
継続期間: 1987 10 191987 10 23

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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