Smallest dead volume microvalves for integrated chemical analyzing systems

Shuichi Shoji, Bart Van der Schoot, Nico de Rooij, Masayoshi Esashi

研究成果: Conference contribution

33 引用 (Scopus)

抄録

Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 μl/min to tens of μl/min. These valves are useful for constructing integrated chemical analyzing systems.

元の言語English
ホスト出版物のタイトルTransducers '91
出版場所Piscataway, NJ, United States
出版者Publ by IEEE
ページ1052-1055
ページ数4
ISBN(印刷物)0879425857
出版物ステータスPublished - 1991
外部発表Yes
イベント1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
継続期間: 1991 6 241991 6 28

Other

Other1991 International Conference on Solid-State Sensors and Actuators
San Francisco, CA, USA
期間91/6/2491/6/28

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Actuators

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Shoji, S., Van der Schoot, B., de Rooij, N., & Esashi, M. (1991). Smallest dead volume microvalves for integrated chemical analyzing systems. : Transducers '91 (pp. 1052-1055). Piscataway, NJ, United States: Publ by IEEE.

Smallest dead volume microvalves for integrated chemical analyzing systems. / Shoji, Shuichi; Van der Schoot, Bart; de Rooij, Nico; Esashi, Masayoshi.

Transducers '91. Piscataway, NJ, United States : Publ by IEEE, 1991. p. 1052-1055.

研究成果: Conference contribution

Shoji, S, Van der Schoot, B, de Rooij, N & Esashi, M 1991, Smallest dead volume microvalves for integrated chemical analyzing systems. : Transducers '91. Publ by IEEE, Piscataway, NJ, United States, pp. 1052-1055, 1991 International Conference on Solid-State Sensors and Actuators, San Francisco, CA, USA, 91/6/24.
Shoji S, Van der Schoot B, de Rooij N, Esashi M. Smallest dead volume microvalves for integrated chemical analyzing systems. : Transducers '91. Piscataway, NJ, United States: Publ by IEEE. 1991. p. 1052-1055
Shoji, Shuichi ; Van der Schoot, Bart ; de Rooij, Nico ; Esashi, Masayoshi. / Smallest dead volume microvalves for integrated chemical analyzing systems. Transducers '91. Piscataway, NJ, United States : Publ by IEEE, 1991. pp. 1052-1055
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