Smallest dead volume microvalves for integrated chemical analyzing systems

Shuichi Shoji, Bart Van der Schoot, Nico de Rooij, Masayoshi Esashi

研究成果: Conference contribution

34 被引用数 (Scopus)

抄録

Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 μl/min to tens of μl/min. These valves are useful for constructing integrated chemical analyzing systems.

本文言語English
ホスト出版物のタイトルTransducers '91
出版社Publ by IEEE
ページ1052-1055
ページ数4
ISBN(印刷版)0879425857
出版ステータスPublished - 1991 12 1
外部発表はい
イベント1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
継続期間: 1991 6 241991 6 28

出版物シリーズ

名前Transducers '91

Other

Other1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period91/6/2491/6/28

ASJC Scopus subject areas

  • Engineering(all)

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