Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter

Takayuki Homma, Hirotaka Sato, Hideomi Kobayashi, Takahiro Arakawa, Hiroyuki Kudo, Testuya Osaka, Shuichi Shoji, Yoshitaka Ishisaki, Tai Oshima, Naoko Iyomoto, Ryuichi Fujimoto, Kazuhisa Mitsuda

研究成果: Conference article査読

11 被引用数 (Scopus)

抄録

Sn electrodeposition was employed for fabricating an array of microabsorbers with a 'mushroom-shaped' microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.

本文言語English
ページ(範囲)143-148
ページ数6
ジャーナルJournal of Electroanalytical Chemistry
559
DOI
出版ステータスPublished - 2003 11 15
イベントInternational Symposium on Materials Processing for Nonstruct (MPND2001) - Kyoto, Japan
継続期間: 2001 9 162001 9 19

ASJC Scopus subject areas

  • 分析化学
  • 化学工学(全般)
  • 電気化学

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