SOI-DRAM with wide operating voltage range by CMOS/SIMOX technology

Katsuhiro Suma, Takahiro Tsuruda, Hideto Hidaka, Takahisa Eimori, Toshiyuki Oashi, Yasuo Yamaguchi, Toshiaki Iwamatsu, Masakazu Hirose, Fukashi Morishita, Kazutami Arimoto, Kazuyasu Fujishima, Yasuo Inoue, Tadashi Nishimura, Tsutomu Yoshihara

研究成果: Article査読

26 被引用数 (Scopus)


An SOI-DRAM test device (64-Kb scale) with 100-nm-thick SOI film has been fabricated in 0.5-μm CMOS/SIMOX technology and the basic DRAM function has been successfully observed. A partially depleted transistor was used to solve the floating-body effect, resulting in improved operation. The newly introduced body-synchronized sensing scheme enhances the lower Vcc margin. The p-n junction capacitance between source/drain and a substrate for SOI structure is reduced by 25%. RAS access time tRAC is 70 ns with a 2.7-V power supply, which is as fast as the equivalent bulk-Si device with a 4-V power supply. The active current consumption is 1.1 mA (Vcc = 3.0 V, 260-ns cycle) for this SOI-DRAM, which is a reduction of 65%, compared with 3.2 mA for the reference bulk-Si DRAM. The mean value of data retention time for this chip at 80 °C is longer than 20 s (Vcc = 3.3 V), which is the same value as mass-produced 16-Mb DRAM's. The SOI-DRAM has an operating Vcc range from 2.3 V to 4.0 V. The observed speed enhancement and the wide operating voltage range indicate high performance at the low voltage operation suitable for battery-operated DRAM's.

ジャーナルIEEE Journal of Solid-State Circuits
出版ステータスPublished - 1994 11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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