Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Minoru Osada, Kosho Akatsuka, Yasuo Ebina, Hiroshi Funakubo, Takanori Kiguchi, Kazunori Takada, Takayoshi Sasaki

研究成果: Article

8 引用 (Scopus)

抄録

We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

元の言語English
ページ(範囲)6979-6983
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
発行部数10 B
DOI
出版物ステータスPublished - 2007 10 22
外部発表Yes

Fingerprint

Nanosheets
titanium
Titanium
Fabrication
fabrication
Multilayers
Lamellar structures
High resolution transmission electron microscopy
Leakage currents
leakage
Permittivity
Current density
assembly
permittivity
current density
transmission electron microscopy
high resolution
Substrates

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block. / Osada, Minoru; Akatsuka, Kosho; Ebina, Yasuo; Funakubo, Hiroshi; Kiguchi, Takanori; Takada, Kazunori; Sasaki, Takayoshi.

:: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 46, 番号 10 B, 22.10.2007, p. 6979-6983.

研究成果: Article

Osada, Minoru ; Akatsuka, Kosho ; Ebina, Yasuo ; Funakubo, Hiroshi ; Kiguchi, Takanori ; Takada, Kazunori ; Sasaki, Takayoshi. / Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block. :: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; 巻 46, 番号 10 B. pp. 6979-6983.
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AU - Kiguchi, Takanori

AU - Takada, Kazunori

AU - Sasaki, Takayoshi

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