Solution growth of AlN single crystal using Cu solvent under atmospheric pressure nitrogen

K. Kamei, Y. Shirai, T. Tanaka, N. Okada, A. Yauchi, H. Amano

研究成果: Article

23 引用 (Scopus)

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We have grown thick AlN epilayers on SiC substrates by a new solution growth technique using Cu solvents under atmospheric pressure nitrogen. By using growth apparatus based on CZ growth system with inductive heating, we have grown AlN single crystalline layers of which thickness were more than 200 μm on (4H,6H)-SiC substrates at relatively low growth temperatures such as 1600 °C-1800 °C. Inch-size self standing AlN crystals were also prepared by removing the SiC substrate. TEM observation, ω-scan XRD measurement and cathode luminescence spectroscopy were conducted to characterize the crystallinity of the obtained AlN layers.

元の言語English
ページ(範囲)2211-2214
ページ数4
ジャーナルPhysica Status Solidi (C) Current Topics in Solid State Physics
4
発行部数7
DOI
出版物ステータスPublished - 2007
外部発表Yes

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ASJC Scopus subject areas

  • Condensed Matter Physics

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