A low temperature scanning synchrotron microscope (LTSSM) has been developed for spatial analysis of superconducting tunnel junction X-ray detectors. One and two-dimensional images of the detector response to X-rays were measured by scanning the junctions kept at a working temperature of about 0.4 K with a highly collimated synchrotron radiation beam. The collimation was performed by inserting a pinhole mounted on a scanning unit into the synchrotron radiation in the range of 3-6 keV. The spatial resolution of the LTSSM is between 5 and 10 micrometer. The present results indicate a large discrepancy between the experimental spatial response and a quasiparticle diffusion and edge-loss model. The LTSSM plays an important role in the development of cryogenic X-ray detectors.
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