Statistical-noise effect on power spectrum of line-edge and line-width roughness with long-range correlation

Atsushi Hiraiwa, Akio Nishida

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

We formerly developed the "assembly method" for analyzing the line-edge and line-width roughness (LER/LWR) that has a long-range correlation beyond the conventional analysis limit. In the method, we repeatedly assembled virtual long lines by gathering line segments, which were arbitrarily disposed on actual long lines and by randomly changing their combination and order, permitting the assembled lines to share the same line segments. Then, we obtained the PSD of the LER/LWR of the assembled lines considering the lines as seamless. We also derived an analytic formula of the assembled-line PSDs. This formula excellently agreed with experimental PSDs. In this report, we propose guidelines for suppressing the statistical-noise effect on the assembly method for the purpose of accurately analyzing the long-range- correlated LER/LWR. The guidelines will greatly help shed light on the long-range correlation, which causes the variability even in large devices but has long been veiled due to the lack of metrology.

元の言語English
ホスト出版物のタイトルProceedings of SPIE - The International Society for Optical Engineering
7971
DOI
出版物ステータスPublished - 2011
外部発表Yes
イベントMetrology, Inspection, and Process Control for Microlithography XXV - San Jose, CA
継続期間: 2011 2 282011 3 3

Other

OtherMetrology, Inspection, and Process Control for Microlithography XXV
San Jose, CA
期間11/2/2811/3/3

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • これを引用

    Hiraiwa, A., & Nishida, A. (2011). Statistical-noise effect on power spectrum of line-edge and line-width roughness with long-range correlation. : Proceedings of SPIE - The International Society for Optical Engineering (巻 7971). [79710J] https://doi.org/10.1117/12.878582