Statistical-noise effect on power spectrum of long-range-correlated line-edge and line-width roughness

Atsushi Hiraiwa*, Akio Nishida

*この研究の対応する著者

研究成果: Article査読

7 被引用数 (Scopus)

抄録

We formerly developed the "assembly method" for analyzing the line-edge and line-width roughness (LER/LWR) that has a long-range correlation beyond the conventional analysis limit, as reported in a previous work. In that method, we repeatedly assembled virtual long lines by gathering line segments, which were arbitrarily disposed on actual long lines and by randomly changing their combination and order, permitting the assembled lines to share the same line segments. Then, we obtained the power spectral density (PSD) of the LER/LWR of the assembled lines considering the lines as seamless. We also derived an analytic formula of the assembled-line PSDs for use in the PSD fitting method. This formula agreed very well with experimental PSDs. In this report, we propose guidelines for suppressing the statistical-noise effect on the assembly method for the purpose of accurately analyzing the long-range-correlated LER/LWR. The guidelines will greatly help shed light on the long-range correlation, which causes the variability even in large devices but has long been veiled due to the lack of metrology.

本文言語English
論文番号033008
ジャーナルJournal of Micro/Nanolithography, MEMS, and MOEMS
10
3
DOI
出版ステータスPublished - 2011

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学
  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 原子分子物理学および光学

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