The microstructure of electroless-plated CoNiReP thin films in the initial deposition state were investigated by transmission electron microscopy (TEM), scanning electron microscopy (SEM) and scanning tunneling microscopy (STM). The films consisted of grains 30-50 nm in diameter. The result of STM observation presented a more detailed structure than that obtained by TEM and SEM. Also, the STM observation was effective in evaluating the minute structure of the films.
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