Stm observation of electroless-plated cobalt alloy thin films

Tetsuya Osaka, Takayuki Homma, Kingo Itaya, Shizuo Sugawara

研究成果: Article

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The microstructure of electroless-plated CoNiReP thin films in the initial deposition state were investigated by transmission electron microscopy (TEM), scanning electron microscopy (SEM) and scanning tunneling microscopy (STM). The films consisted of grains 30-50 nm in diameter. The result of STM observation presented a more detailed structure than that obtained by TEM and SEM. Also, the STM observation was effective in evaluating the minute structure of the films.

元の言語English
ページ(範囲)L465-L467
ジャーナルJapanese journal of applied physics
28
発行部数3 A
DOI
出版物ステータスPublished - 1989 3

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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