Stranski-Krastanov growth of tungsten during chemical vapor deposition revealed by micro-auger electron spectroscopy

Suguru Noda, Takeshi Tsumura, Jota Fukuhara, Takashi Yoda, Hiroshi Komiyama, Yukihiro Shimogaki

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Chemical vapor deposition (CVD) of tungsten is an important process to make interconnections in advanced integrated-circuit devices. As device dimensions continue to decrease, incomplete nucleation inside the trenches and via holes is becoming a crucial issue. In this work, micro-Auger electron spectroscopy with in-plane spatial resolution was applied for the first time to study the nucleation and growth process of W islands. Results showed that W grew slowly and uniformly on TiN surfaces up to about one-monolayer coverage, and then W islands nucleated and started to grow rapidly. This transition from layer to island shows that W grew by Stranski-Krastanov mode during CVD on TiN from WF6 and SiH4. Drastic difference might exist in chemical reactivity between the initial W layer on TiN surfaces and the W islands, causing the change in W growth rate.

本文言語English
ページ(範囲)6974-6977
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
43
10
DOI
出版ステータスPublished - 2004 10 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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