Structural change induced in LaAlO3 by ion implantation

Masayuki Harima, Yosuke Horii, Takaaki Morimoto, Yoshimichi Ohki

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

Ion implantation is used for various purposes in manufacturing semiconductor devices such as MOS-FETs. In the present study, effects of implantation of P+ or B+ ions on the structural change of single crystal LaAlO3 were examined. The optical absorption edge located at about 5.6 eV, which corresponds to the band gap energy of LaAlO 3, is scarcely affected by the ion implantation. The X-ray diffraction peak intensity at 2θ= 23.5° is decreased by the ion implantation. The intensities of three sharp photoluminescence (PL) peaks detected at 1.62, 1.65, and 1.69 eV, which appear only when the samples are crystalline, become smaller by ion implantation. However, the intensity of a broad PL peak at around 2.8 eV due to the oxygen vacancy, which is also detectable in amorphous samples, scarcely changes after the ion implantation. These results indicate that the ion implantation degrades the crystalline LaAlO3. However, as compared with YAlO3 with a similar perovskite structure, LaAlO3 is more resistant to ion implantation.

元の言語English
ホスト出版物のタイトルProceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014
出版者Institute of Electrical Engineers of Japan
ページ180-183
ページ数4
ISBN(印刷物)9784886860866
DOI
出版物ステータスPublished - 2014 1 1
イベント2014 International Symposium on Electrical Insulating Materials, ISEIM 2014 - Niigata, Japan
継続期間: 2014 6 12014 6 5

出版物シリーズ

名前Proceedings of the International Symposium on Electrical Insulating Materials

Other

Other2014 International Symposium on Electrical Insulating Materials, ISEIM 2014
Japan
Niigata
期間14/6/114/6/5

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • これを引用

    Harima, M., Horii, Y., Morimoto, T., & Ohki, Y. (2014). Structural change induced in LaAlO3 by ion implantation. : Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014 (pp. 180-183). [6870748] (Proceedings of the International Symposium on Electrical Insulating Materials). Institute of Electrical Engineers of Japan. https://doi.org/10.1109/ISEIM.2014.6870748