Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, Atsushi Hosoi, Y. Ju

研究成果: Article

2 引用 (Scopus)

抄録

In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

元の言語English
ページ(範囲)715-720
ページ数6
ジャーナルMicrosystem Technologies
17
発行部数4
DOI
出版物ステータスPublished - 2011 4
外部発表Yes

Fingerprint

Microscopes
microscopes
Microwaves
microwaves
conductivity
probes
Electric network analyzers
Focused ion beams
analyzers
Electric properties
Waveguides
ion beams
electrical properties
atomic force microscopy
waveguides
reflectance
Fabrication
fabrication
electrical resistivity
evaluation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

これを引用

Structure modification of M-AFM probe for the measurement of local conductivity. / Fujimoto, A.; Zhang, L.; Hosoi, Atsushi; Ju, Y.

:: Microsystem Technologies, 巻 17, 番号 4, 04.2011, p. 715-720.

研究成果: Article

Fujimoto, A. ; Zhang, L. ; Hosoi, Atsushi ; Ju, Y. / Structure modification of M-AFM probe for the measurement of local conductivity. :: Microsystem Technologies. 2011 ; 巻 17, 番号 4. pp. 715-720.
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