Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, A. Hosoi, Y. Ju*

*この研究の対応する著者

研究成果: Article査読

2 被引用数 (Scopus)

抄録

In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

本文言語English
ページ(範囲)715-720
ページ数6
ジャーナルMicrosystem Technologies
17
4
DOI
出版ステータスPublished - 2011 4
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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