Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, A. Hosoi, Y. Ju

研究成果: Conference contribution

抄録

In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.

本文言語English
ホスト出版物のタイトルSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
ページ22-26
ページ数5
出版ステータスPublished - 2010 10 18
外部発表はい
イベントSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
継続期間: 2010 5 52010 5 7

出版物シリーズ

名前Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

ConferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
国/地域Spain
CitySeville
Period10/5/510/5/7

ASJC Scopus subject areas

  • 電子工学および電気工学

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