Structure of crystallized particles in sputterdeposited amorphous germanium films

Masayuki Okugawa, Ryusuke Nakamura, Akihiko Hirata, Manabu Ishimaru, Hidehiro Yasuda, Hiroshi Numakura

研究成果: Article

2 引用 (Scopus)

抄録

Pristine thin films of amorphous Ge prepared by sputtering are unstable and form coarse crystalline particles of 100 nm in size upon crystallization by electron irradiation. These crystalline particles exhibit unusual diffraction patterns that cannot be understood from the diamond cubic structure. The structure has previously been assumed to be a metastable hexagonal form. In the present work, the structure of the coarse crystalline particles has been analysed in detail by transmission electron microscopy, considering the possibility that those diffraction patterns might occur with the diamond cubic structure if the particle consists of thin twin layers. By high-resolution lattice imaging the particles have been shown to be of the diamond cubic structure containing a high density of twins and stacking faults parallel to {111}. With such defects, diffraction patterns can be complex because of the following effects: superposition of two or more diffraction patterns of the same structure but of different orientations, double diffraction through twin crystals, and streaks parallel to the thin crystal which give rise to extra diffraction spots. It is found that diffraction patterns taken from various orientations can be explained in terms of these effects.

元の言語English
ページ(範囲)1467-1473
ページ数7
ジャーナルJournal of Applied Crystallography
51
発行部数5
DOI
出版物ステータスPublished - 2018 10 1

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Germanium
Diamond
Diffraction patterns
Crystalline materials
Crystallization
Transmission Electron Microscopy
Diffraction
Crystals
Electron irradiation
Electrons
Stacking faults
Crystal orientation
Sputtering
Transmission electron microscopy
Imaging techniques
Thin films
Defects

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)

これを引用

Structure of crystallized particles in sputterdeposited amorphous germanium films. / Okugawa, Masayuki; Nakamura, Ryusuke; Hirata, Akihiko; Ishimaru, Manabu; Yasuda, Hidehiro; Numakura, Hiroshi.

:: Journal of Applied Crystallography, 巻 51, 番号 5, 01.10.2018, p. 1467-1473.

研究成果: Article

Okugawa, Masayuki ; Nakamura, Ryusuke ; Hirata, Akihiko ; Ishimaru, Manabu ; Yasuda, Hidehiro ; Numakura, Hiroshi. / Structure of crystallized particles in sputterdeposited amorphous germanium films. :: Journal of Applied Crystallography. 2018 ; 巻 51, 番号 5. pp. 1467-1473.
@article{d584961737ca4845b25e0fefcb1d8588,
title = "Structure of crystallized particles in sputterdeposited amorphous germanium films",
abstract = "Pristine thin films of amorphous Ge prepared by sputtering are unstable and form coarse crystalline particles of 100 nm in size upon crystallization by electron irradiation. These crystalline particles exhibit unusual diffraction patterns that cannot be understood from the diamond cubic structure. The structure has previously been assumed to be a metastable hexagonal form. In the present work, the structure of the coarse crystalline particles has been analysed in detail by transmission electron microscopy, considering the possibility that those diffraction patterns might occur with the diamond cubic structure if the particle consists of thin twin layers. By high-resolution lattice imaging the particles have been shown to be of the diamond cubic structure containing a high density of twins and stacking faults parallel to {111}. With such defects, diffraction patterns can be complex because of the following effects: superposition of two or more diffraction patterns of the same structure but of different orientations, double diffraction through twin crystals, and streaks parallel to the thin crystal which give rise to extra diffraction spots. It is found that diffraction patterns taken from various orientations can be explained in terms of these effects.",
keywords = "Crystallized Ge thin films, Streaking effects, Twinning",
author = "Masayuki Okugawa and Ryusuke Nakamura and Akihiko Hirata and Manabu Ishimaru and Hidehiro Yasuda and Hiroshi Numakura",
year = "2018",
month = "10",
day = "1",
doi = "10.1107/S1600576718012153",
language = "English",
volume = "51",
pages = "1467--1473",
journal = "Journal of Applied Crystallography",
issn = "0021-8898",
publisher = "International Union of Crystallography",
number = "5",

}

TY - JOUR

T1 - Structure of crystallized particles in sputterdeposited amorphous germanium films

AU - Okugawa, Masayuki

AU - Nakamura, Ryusuke

AU - Hirata, Akihiko

AU - Ishimaru, Manabu

AU - Yasuda, Hidehiro

AU - Numakura, Hiroshi

PY - 2018/10/1

Y1 - 2018/10/1

N2 - Pristine thin films of amorphous Ge prepared by sputtering are unstable and form coarse crystalline particles of 100 nm in size upon crystallization by electron irradiation. These crystalline particles exhibit unusual diffraction patterns that cannot be understood from the diamond cubic structure. The structure has previously been assumed to be a metastable hexagonal form. In the present work, the structure of the coarse crystalline particles has been analysed in detail by transmission electron microscopy, considering the possibility that those diffraction patterns might occur with the diamond cubic structure if the particle consists of thin twin layers. By high-resolution lattice imaging the particles have been shown to be of the diamond cubic structure containing a high density of twins and stacking faults parallel to {111}. With such defects, diffraction patterns can be complex because of the following effects: superposition of two or more diffraction patterns of the same structure but of different orientations, double diffraction through twin crystals, and streaks parallel to the thin crystal which give rise to extra diffraction spots. It is found that diffraction patterns taken from various orientations can be explained in terms of these effects.

AB - Pristine thin films of amorphous Ge prepared by sputtering are unstable and form coarse crystalline particles of 100 nm in size upon crystallization by electron irradiation. These crystalline particles exhibit unusual diffraction patterns that cannot be understood from the diamond cubic structure. The structure has previously been assumed to be a metastable hexagonal form. In the present work, the structure of the coarse crystalline particles has been analysed in detail by transmission electron microscopy, considering the possibility that those diffraction patterns might occur with the diamond cubic structure if the particle consists of thin twin layers. By high-resolution lattice imaging the particles have been shown to be of the diamond cubic structure containing a high density of twins and stacking faults parallel to {111}. With such defects, diffraction patterns can be complex because of the following effects: superposition of two or more diffraction patterns of the same structure but of different orientations, double diffraction through twin crystals, and streaks parallel to the thin crystal which give rise to extra diffraction spots. It is found that diffraction patterns taken from various orientations can be explained in terms of these effects.

KW - Crystallized Ge thin films

KW - Streaking effects

KW - Twinning

UR - http://www.scopus.com/inward/record.url?scp=85054074132&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85054074132&partnerID=8YFLogxK

U2 - 10.1107/S1600576718012153

DO - 10.1107/S1600576718012153

M3 - Article

VL - 51

SP - 1467

EP - 1473

JO - Journal of Applied Crystallography

JF - Journal of Applied Crystallography

SN - 0021-8898

IS - 5

ER -