Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

H. Shinohara, T. Suzuki, J. Mizuno, S. Shoji

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.

元の言語English
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ1039-1042
ページ数4
DOI
出版物ステータスPublished - 2009 12 11
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
継続期間: 2009 6 212009 6 25

出版物シリーズ

名前TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
United States
Denver, CO
期間09/6/2109/6/25

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • これを引用

    Shinohara, H., Suzuki, T., Mizuno, J., & Shoji, S. (2009). Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1039-1042). [5285966] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285966