TY - JOUR
T1 - Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer
AU - Shinohara, Hidetoshi
AU - Mizuno, Jun
AU - Shoji, Shuichi
N1 - Funding Information:
This research was supported by the Grant-in-Aid for Specially Promoted Research “Establishment of Electrochemical Device Engineering” , and the Waseda University Global COE Program “International Research and Education Center for Ambient SoC” sponsored by MEXT, Japan. The authors also thank TORAY Research Center, Inc. for technical advices of ATR-FT-IR analyses, and KRATOS Japan for technical advices of XPS analyses.
PY - 2011/1
Y1 - 2011/1
N2 - Low-temperature direct bonding of two cyclo-olefin polymer (COP) plates is realized by pretreatments of vacuum ultraviolet (VUV) light irradiation, VUV irradiation in the presence of oxygen gas (VUV/O3), or oxygen plasma treatment. The bond strength was strong enough to observe bulk destruction on the fractured surfaces after the tensile test of the sample. To investigate the mechanism underlying the low-temperature direct bonding, attenuated total reflection Fourier-transform infrared spectrometer (ATR-FT-IR), X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM) surface analysis methods were carried out for the treated COP samples. These experimental results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate dipolar interactions including hydrogen bonds on the surfaces of the pretreated COPs at room temperature. In case of VUV and VUV/O3 treatments, degradation of COP was also occurred and the degradation layer acted as an adhesive for the direct bonding. Thermal annealing enhances creation of strong covalent bonds (-C-O-C-) changed from hydrogen bonds.
AB - Low-temperature direct bonding of two cyclo-olefin polymer (COP) plates is realized by pretreatments of vacuum ultraviolet (VUV) light irradiation, VUV irradiation in the presence of oxygen gas (VUV/O3), or oxygen plasma treatment. The bond strength was strong enough to observe bulk destruction on the fractured surfaces after the tensile test of the sample. To investigate the mechanism underlying the low-temperature direct bonding, attenuated total reflection Fourier-transform infrared spectrometer (ATR-FT-IR), X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM) surface analysis methods were carried out for the treated COP samples. These experimental results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate dipolar interactions including hydrogen bonds on the surfaces of the pretreated COPs at room temperature. In case of VUV and VUV/O3 treatments, degradation of COP was also occurred and the degradation layer acted as an adhesive for the direct bonding. Thermal annealing enhances creation of strong covalent bonds (-C-O-C-) changed from hydrogen bonds.
KW - Cyclo-olefin polymer
KW - Direct bonding
KW - Oxygen plasma
KW - Vacuum ultraviolet light
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U2 - 10.1016/j.sna.2010.04.006
DO - 10.1016/j.sna.2010.04.006
M3 - Article
AN - SCOPUS:79951769670
SN - 0924-4247
VL - 165
SP - 124
EP - 131
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 1
ER -