Study on a diode-bridge type capacitance detection circuit for differential capacitive sensor

Takahiro Matsuo, Jinxing Liang, Joanna Pawlat, Toshitsugu Ueda

    研究成果: Conference contribution

    3 被引用数 (Scopus)

    抄録

    Diode-bridge type capacitance detection circuit was developed in order to detect very small variation of differential capacitances in higher resolution. The circuit was designed for a comb structure tilt sensor, which was made of quartz crystal and had several movable electrodes between fixed electrodes. The circuit's output was almost proportional to the displacement of the movable electrode. Over 100kHz AC voltage was supplied to obtain output signal sufficiently. In order to prevent decrease of the sensitivity, the diode-bridge part was composed of commercial PIN diodes, which had very low junction capacitance (less than 1pF), and was mounted in small ceramic package with the tilt sensor. At present, the resolution of 0.0015 degree was obtained using the combination of the sensor and the detection circuit. It corresponded to the resolution of about less than 4.5aF.

    本文言語English
    ホスト出版物のタイトルProceedings of IEEE Sensors
    ページ1123-1126
    ページ数4
    DOI
    出版ステータスPublished - 2006
    イベント2006 5th IEEE Conference on Sensors - Daegu
    継続期間: 2006 10 222006 10 25

    Other

    Other2006 5th IEEE Conference on Sensors
    CityDaegu
    Period06/10/2206/10/25

    ASJC Scopus subject areas

    • 工学(その他)
    • 電子工学および電気工学

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