High linear energy transfer (LET) heavy ion beams were used to irradiate poly(tetrafluoroethylene-co-ethylene) (ETFE) under vacuum and in air. The irradiation effects in ETFE as a function of the depth were precisely evaluated by analyzing each of the films of the irradiated samples, which were made of stacked ETFE films. It was indicated that conjugated double bonds were generated by heavy ion beam irradiation, and their amounts showed the Bragg-curve-like distributions. Also, it was suggested that higher LET beams would induce radical formation in high density and longer conjugated C=C double bonds could be generated by the second-order reactions. Moreover, for samples irradiated in air, C=O was produced correlating to the yield of oxygen molecules diffusing from the sample surface.
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