@article{3e476866cc364769a3f6093b90b5d972,
title = "Study on direct etching of poly(tetrafluoroethylene) by high-energy heavy ion beams",
abstract = "Micro-fabrication of poly(tetrafluoroethylene) (PTFE) was carried out using a high-energy heavy ion beam in the MeV region. PTFE was irradiated with various ions (6MeV/u) under vacuum (<1.0×10-4Pa) at room temperature (298K). The surface of the irradiated PTFE was observed by laser microscopy and a scanning electron microscope (SEM). Micro-scale fabrications of PTFE were successfully performed by direct ion beam etching. Under our experimental conditions the etching proceeded more effectively by heavy ion beams (larger than N7+), compared with lower-energy ion beams (keV region). A larger atomic number (Z) of the irradiating ion induced higher etching rates in PTFE; the etching rate for Ne10+ and Xe54+ changed from 6.5×10-13 to 2.0×10-11μm/(ioncm-2), respectively. As a result we suggest that due to their high electronic stopping powers, etching could be efficiently achieved using high-energy ion beams.",
keywords = "Direct etching, Heavy ion beam, LET, Micro-fabrication, PTFE, Stopping power",
author = "Hidehiro Tsubokura and Akihiro Oshima and Oyama, {Tomoko G.} and Yuya Takasawa and Naoyuki Fukutake and Satoshi Okubo and Taeko Yoshikawa and Toshitaka Oka and Takeshi Murakami and Yoshimasa Hama and Masakazu Washio",
note = "Funding Information: This study was supported by the Research Institute for Science and Engineering (RISE) research project: “Nano-fabrication of polymers by means of quantum beam technology”, Waseda University ( 11L01 ), and the research projects with heavy ions at NIRS-HIMAC ( 19P186 , 10H186 ). The authors would like to thank the staff of the HIMAC operation division and the accelerator engineering company for help with the ion beam irradiation experiments. A part of this work (Oshima) was supported by a Grant-in-Aid for Young Scientists (A) 21686087 from the Japan Society for the promotion of science (JSPS) . Copyright: Copyright 2013 Elsevier B.V., All rights reserved.",
year = "2013",
month = nov,
doi = "10.1016/j.radphyschem.2013.06.020",
language = "English",
volume = "92",
pages = "37--42",
journal = "Radiation Physics and Chemistry",
issn = "0969-806X",
publisher = "Elsevier Limited",
}