Study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process

Yoshihiro Sawada, Hideya Kobari, Yoshimi Sato, Akira Hashimoto, Ichiro Koiwa, Hiroyo Kobayashi, Tetsuya Osaka

研究成果: Conference article査読

1 被引用数 (Scopus)


We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.

ジャーナルIntegrated Ferroelectrics
出版ステータスPublished - 1999
イベントThe 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA
継続期間: 1999 3 71999 3 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

フィンガープリント 「Study on low-temperature crystallization of SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub> thin films prepared by sol-gel method using steam curing process」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。