TY - JOUR
T1 - Study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process
AU - Sawada, Yoshihiro
AU - Kobari, Hideya
AU - Sato, Yoshimi
AU - Hashimoto, Akira
AU - Koiwa, Ichiro
AU - Kobayashi, Hiroyo
AU - Osaka, Tetsuya
PY - 1999
Y1 - 1999
N2 - We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.
AB - We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.
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U2 - 10.1080/10584589908215621
DO - 10.1080/10584589908215621
M3 - Conference article
AN - SCOPUS:0033347344
SN - 1058-4587
VL - 26
SP - 187
EP - 195
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1
T2 - The 11th International Symposium on Integrated Ferroelectrics (ISIF99)
Y2 - 7 March 1999 through 10 March 1999
ER -