Super-resolution raman spectroscopy by digital image processing

Motohiro Tomita, Hiroki Hashiguchi, Takuya Yamaguchi, Munehisa Takei, Daisuke Kosemura, Atsushi Ogura

研究成果: Article査読

3 被引用数 (Scopus)

抄録

We demonstrate the results of a strain (stress) evaluation obtained from Raman spectroscopy measurements with the super-resolution method (the so-called super-resolution Raman spectroscopy) for a Si substrate with a patterned SiN film (serving as a strained Si sample). To improve the spatial resolution of Raman spectroscopy, we used the super-resolution method and a high-numerical-aperture immersion lens. Additionally, we estimated the spatial resolution by an edge force model (EFM) calculation. One- and two-dimensional stress distributions in the Si substrate with the patterned SiN film were obtained by super-resolution Raman spectroscopy. The results from both super-resolution Raman spectroscopy and the EFM calculation were compared and were found to correlate well. The best spatial resolution, 70 nm, was achieved by super-resolution Raman measurements with an oil immersion lens. We conclude that super-resolution Raman spectroscopy is a useful method for evaluating stress in miniaturized state-of-the-art transistors, and we believe that the super-resolution method will soon be a requisite technique.

本文言語English
論文番号459032
ジャーナルJournal of Spectroscopy
1
1
DOI
出版ステータスPublished - 2013
外部発表はい

ASJC Scopus subject areas

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Spectroscopy

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