Surface topography of sputtered CuxMo6S8 films

R. Ohtaki, B. R. Zhao, H. L. Luo, N. M. Davis

研究成果: Article査読

7 被引用数 (Scopus)

抄録

The Chevrel phase CuxMo6S8 was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.

本文言語English
ページ(範囲)575-578
ページ数4
ジャーナルMaterials Research Bulletin
17
5
DOI
出版ステータスPublished - 1982 5
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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