Survey of the metal nucleation processes on silicon surfaces in fluoride solutions: From dilute HF to concentrated NH4F solutions
Marius Chemla*, Takayuki Homma, Valerie Bertagna, Rene Erre, Nobuhiro Kubo, Tetsuya Osaka
*この研究の対応する著者
研究成果: Conference article › 査読
45
被引用数
(Scopus)