Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Hisashi Terae, Binh Khiem Nguyen, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ794-797
ページ数4
DOI
出版ステータスPublished - 2008 8 29
外部発表はい
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント 「Tapered waveguide by liquid for a coupler of optical fibers to mems devices」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル