Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films

Takahiko Yanagitani*, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Thickness extensional mode FBAR consisting of (0001) textured ZnO films and pure thickness shear mode FBAR consisting of (112̄0) textured ZnO films were fabricated. Temperature coefficients of frequency (TCF) of these FBARs were measured in the temperature range of 10-60 °C. In both of the resonators, the parallel resonant frequencies varied linearly with temperature. The TCF were determined as -63.1 [ppm/°C] for thickness extensional mode resonator and -34.7 [ppm/°C] for pure-shear mode resonator.

本文言語English
ホスト出版物のタイトル2006 IEEE International Ultrasonics Symposium, IUS
ページ1459-1462
ページ数4
DOI
出版ステータスPublished - 2006 12月 1
外部発表はい

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
1
ISSN(印刷版)1051-0117

ASJC Scopus subject areas

  • 音響学および超音波学

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