TEMPERATURE SENSOR USING QUARTZ TUNING FORK RESONATOR.

Toshitsugu Ueda*, Fusao Kohsaka, Toshio Iino, Daisuke Yamazaki

*この研究の対応する著者

研究成果: Conference contribution

28 被引用数 (Scopus)

抄録

A temperature sensor based on a temperature-sensitive quartz 'tuning fork' resonator was developed. The resonator was fabricated using photolitography and anisotropic etching. The optimum cut of the crystal and optimum resonator orientation on the wafer were determined, taking into account the anisotropic etching properties of the crystal, to give a large temperature coefficient of frequency consistent with small equivalent series resistance. The tuning fork temperature sensor operates over a wide temperature range (from 4. 2K to 250 degree C). After the temperature sensor was cycled between 0 degree C and 4. 2K, hysteresis in the temperature characteristic was only 0. 005K at 0 degree C. The quartz temperature sensor is quite compact; it is mounted in a hermetic case only 3 mm in diameter.

本文言語English
ホスト出版物のタイトルProceedings of the Annual IEEE International Frequency Control Symposium
出版社IEEE
ページ224-229
ページ数6
出版ステータスPublished - 1986
外部発表はい

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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