A temperature sensor based on a temperature-sensitive quartz 'tuning fork' resonator was developed. The resonator was fabricated using photolitography and anisotropic etching. The optimum cut of the crystal and optimum resonator orientation on the wafer were determined, taking into account the anisotropic etching properties of the crystal, to give a large temperature coefficient of frequency consistent with small equivalent series resistance. The tuning fork temperature sensor operates over a wide temperature range (from 4. 2K to 250 degree C). After the temperature sensor was cycled between 0 degree C and 4. 2K, hysteresis in the temperature characteristic was only 0. 005K at 0 degree C. The quartz temperature sensor is quite compact; it is mounted in a hermetic case only 3 mm in diameter.
|ホスト出版物のタイトル||Proceedings of the Annual IEEE International Frequency Control Symposium|
|出版ステータス||Published - 1986|
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