The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Takahiro Shimidzu, Takahiko Yanagitani, Kiyotaka Wasa

    研究成果: Conference contribution


    Film bulk acoustic wave resonator (FBAR) filters are promising for the mobile communication devices. Frequency switchable filters are suitable for selecting the vacant frequency bands. Usual polarity unidirectional single layer resonator excites fundamental mode whereas polarity inverted double layer resonator excites second mode. In this study, we considered that polarity inverted structure is easily obtained by applying DC field, which is less than coercive field of BaTiO3, to two-layered BST/BaTiO3 epitaxial films. During the application of -36 V, the two-layered resonator excites fundamental mode. On the other hand, during the application of +36 V, the resonator excites second mode. These results show frequency band switching by DC field.

    ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
    出版社IEEE Computer Society
    出版ステータスPublished - 2017 10 31
    イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    継続期間: 2017 9 62017 9 9


    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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