The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Takahiro Shimidzu; Takahiko Yanagitani; Kiyotaka Wasa

doi:10.1109/ULTSYM.2017.8092735

The frequency switchable multi-layered BST/BaTiO₃ epitaxial film resonator

Takahiro Shimidzu, Takahiko Yanagitani, Kiyotaka Wasa

研究成果: Conference contribution

抄録

Film bulk acoustic wave resonator (FBAR) filters are promising for the mobile communication devices. Frequency switchable filters are suitable for selecting the vacant frequency bands. Usual polarity unidirectional single layer resonator excites fundamental mode whereas polarity inverted double layer resonator excites second mode. In this study, we considered that polarity inverted structure is easily obtained by applying DC field, which is less than coercive field of BaTiO₃, to two-layered BST/BaTiO₃ epitaxial films. During the application of -36 V, the two-layered resonator excites fundamental mode. On the other hand, during the application of +36 V, the resonator excites second mode. These results show frequency band switching by DC field.

本文言語	English
ホスト出版物のタイトル	2017 IEEE International Ultrasonics Symposium, IUS 2017
出版社	IEEE Computer Society
ISBN（電子版）	9781538633830
DOI	https://doi.org/10.1109/ULTSYM.2017.8092735
出版ステータス	Published - 2017 10 31
イベント	2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States 継続期間: 2017 9 6 → 2017 9 9

Other

Other	2017 IEEE International Ultrasonics Symposium, IUS 2017
Country	United States
City	Washington
Period	17/9/6 → 17/9/9

ASJC Scopus subject areas

Acoustics and Ultrasonics

文献へのアクセス

10.1109/ULTSYM.2017.8092735

フィンガープリント「The frequency switchable multi-layered BST/BaTiO<sub>3</sub> epitaxial film resonator」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

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abstract = "Film bulk acoustic wave resonator (FBAR) filters are promising for the mobile communication devices. Frequency switchable filters are suitable for selecting the vacant frequency bands. Usual polarity unidirectional single layer resonator excites fundamental mode whereas polarity inverted double layer resonator excites second mode. In this study, we considered that polarity inverted structure is easily obtained by applying DC field, which is less than coercive field of BaTiO3, to two-layered BST/BaTiO3 epitaxial films. During the application of -36 V, the two-layered resonator excites fundamental mode. On the other hand, during the application of +36 V, the resonator excites second mode. These results show frequency band switching by DC field.",

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