The Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow-velocity measurement

Oliver Berberig*, Kay Nottmeyer, Jun Mizuno, Yoshitaka Kanai, Takashi Kobayashi

*この研究の対応する著者

研究成果: Article査読

26 被引用数 (Scopus)

抄録

This paper presents the setup, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well-known classical Prandtl tube [1], it realizes flow-velocity detection by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, which serves as the counter electrode of an integrated capacitor that is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed, including conclusions resulting from a CFD simulation of the flow around a tilted sensor. Results of wind-tunnel experiments confirm the sensor's operation principle.

本文言語English
ページ(範囲)93-98
ページ数6
ジャーナルSensors and Actuators, A: Physical
66
1-3
DOI
出版ステータスPublished - 1998 4 1
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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