The spin-coating process: Analysis of the free boundary value problem

Robert Denk, Matthias Geissert, Matthias Georg Hieber*, Jürgen Saal, Okihiro Sawada

*この研究の対応する著者

研究成果: Article査読

8 被引用数 (Scopus)

抄録

In this paper, an accurate model of the spin-coating process is presented and investigated from the analytical point of view. More precisely, the spin-coating process is being described as a one-phase free boundary value problem for Newtonian fluids subject to surface tension and rotational effects. It is proved that for T > 0 there exists a unique, strong solution to this problem in (0, T) belonging to a certain regularity class provided the data and the speed of rotation are small enough in suitable norms. The strategy of the proof is based on a transformation of the free boundary value problem to a quasilinear evolution equation on a fixed domain. The keypoint for solving the latter equation is the so-called maximal regularity approach. In order to pursue in this direction one needs to determine the precise regularity classes for the associated inhomogeneous linearized equations. This is being achieved by applying the Newton polygon method to the boundary symbol.

本文言語English
ページ(範囲)1145-1192
ページ数48
ジャーナルCommunications in Partial Differential Equations
36
7
DOI
出版ステータスPublished - 2011 7
外部発表はい

ASJC Scopus subject areas

  • 分析
  • 応用数学

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