Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2013|
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