Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

Akinobu Kobayashi; Akihiro Oshima; Satoshi Okubo; Hidehiro Tsubokura; Tomohiro Takahashi; Tomoko Gowa Oyama; Seiichi Tagawa; Masakazu Washio

doi:10.1016/j.nimb.2012.11.002

Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

Akinobu Kobayashi, Akihiro Oshima^*, Satoshi Okubo, Hidehiro Tsubokura, Tomohiro Takahashi, Tomoko Gowa Oyama, Seiichi Tagawa, Masakazu Washio

^*この研究の対応する著者

先進理工学部

研究成果: Article › 査読

4 被引用数 (Scopus)

抄録

Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (R_a) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). R_a of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

本文言語	English
ページ（範囲）	76-80
ページ数	5
ジャーナル	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
巻	295
DOI	https://doi.org/10.1016/j.nimb.2012.11.002
出版ステータス	Published - 2013

ASJC Scopus subject areas

核物理学および高エネルギー物理学
器械工学

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10.1016/j.nimb.2012.11.002

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Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. / Kobayashi, Akinobu; Oshima, Akihiro; Okubo, Satoshi; Tsubokura, Hidehiro; Takahashi, Tomohiro; Oyama, Tomoko Gowa; Tagawa, Seiichi; Washio, Masakazu.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 295, 2013, p. 76-80.

研究成果: Article › 査読

Kobayashi, Akinobu ; Oshima, Akihiro ; Okubo, Satoshi ; Tsubokura, Hidehiro ; Takahashi, Tomohiro ; Oyama, Tomoko Gowa ; Tagawa, Seiichi ; Washio, Masakazu. / Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2013 ; Vol. 295. pp. 76-80.

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title = "Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE",

abstract = "Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.",

keywords = "Electron beam, Mold, Nano-/micro-fabrication, RX-PTFE, TRaf process",

author = "Akinobu Kobayashi and Akihiro Oshima and Satoshi Okubo and Hidehiro Tsubokura and Tomohiro Takahashi and Oyama, {Tomoko Gowa} and Seiichi Tagawa and Masakazu Washio",

note = "Funding Information: A part of this work was supported by “Nanotechnology Network Project” (Handai Multi-functional Nanofoundry in Osaka Univ.) and “Nanotechnology Platform Project [No. F-12-OS-0018 / S-12-OS-0019]” (Nanotechnology Open Facilities in Osaka Univ.) of Ministry of Education, Culture, Sports, Science and Technology, Japan and the RISE Research Projects with Nano-Fabrication of Polymers by means of Quantum Beam Technology of Waseda Univ. [11L01].",

year = "2013",

doi = "10.1016/j.nimb.2012.11.002",

language = "English",

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pages = "76--80",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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AU - Kobayashi, Akinobu

AU - Oshima, Akihiro

AU - Okubo, Satoshi

AU - Tsubokura, Hidehiro

AU - Takahashi, Tomohiro

AU - Oyama, Tomoko Gowa

AU - Tagawa, Seiichi

AU - Washio, Masakazu

N1 - Funding Information: A part of this work was supported by “Nanotechnology Network Project” (Handai Multi-functional Nanofoundry in Osaka Univ.) and “Nanotechnology Platform Project [No. F-12-OS-0018 / S-12-OS-0019]” (Nanotechnology Open Facilities in Osaka Univ.) of Ministry of Education, Culture, Sports, Science and Technology, Japan and the RISE Research Projects with Nano-Fabrication of Polymers by means of Quantum Beam Technology of Waseda Univ. [11L01].

PY - 2013

Y1 - 2013

N2 - Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

AB - Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

KW - Electron beam

KW - Mold

KW - Nano-/micro-fabrication

KW - RX-PTFE

KW - TRaf process

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -

Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

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