Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

Akinobu Kobayashi; Akihiro Oshima; Satoshi Okubo; Hidehiro Tsubokura; Tomohiro Takahashi; Tomoko Gowa Oyama; Seiichi Tagawa; Masakazu Washio

doi:10.1016/j.nimb.2012.11.002

Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

Akinobu Kobayashi, Akihiro Oshima, Satoshi Okubo, Hidehiro Tsubokura, Tomohiro Takahashi, Tomoko Gowa Oyama, Seiichi Tagawa, Masakazu Washio

先進理工学部

研究成果: Article

2 引用（Scopus）

抜粋

Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (R_a) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). R_a of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

元の言語	English
ページ（範囲）	76-80
ページ数	5
ジャーナル	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
巻	295
DOI	https://doi.org/10.1016/j.nimb.2012.11.002
出版物ステータス	Published - 2013 1 7

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

文献にアクセス

10.1016/j.nimb.2012.11.002

フィンガープリント Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

これを引用

Kobayashi, A., Oshima, A., Okubo, S., Tsubokura, H., Takahashi, T., Oyama, T. G., Tagawa, S., & Washio, M. (2013). Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 295, 76-80. https://doi.org/10.1016/j.nimb.2012.11.002

Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. / Kobayashi, Akinobu; Oshima, Akihiro; Okubo, Satoshi; Tsubokura, Hidehiro; Takahashi, Tomohiro; Oyama, Tomoko Gowa; Tagawa, Seiichi; Washio, Masakazu.

：: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 巻 295, 07.01.2013, p. 76-80.

研究成果: Article

Kobayashi, Akinobu ; Oshima, Akihiro ; Okubo, Satoshi ; Tsubokura, Hidehiro ; Takahashi, Tomohiro ; Oyama, Tomoko Gowa ; Tagawa, Seiichi ; Washio, Masakazu. / Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. ：: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2013 ; 巻 295. pp. 76-80.

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abstract = "Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.",

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AU - Takahashi, Tomohiro

AU - Oyama, Tomoko Gowa

AU - Tagawa, Seiichi

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N2 - Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

AB - Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

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