Thermal conductivity of hetero-epitaxial ZnO thin films on c - And r -plane sapphire substrates: Thickness and grain size effect

Yuichiro Yamashita, Kaho Honda, Takashi Yagi, Junjun Jia, Naoyuki Taketoshi, Yuzo Shigesato

研究成果: Article

抄録

The thermal conductivities of c- and a-axis-oriented zinc oxide (ZnO) thin films with nominal thicknesses of 100, 200, and 300 nm are investigated. The c- and a-axis-oriented ZnO thin films were synthesized by radio frequency magnetron sputtering on the c- and r-plane sapphire substrates, respectively. The epitaxial relationship between the ZnO thin film and the c-plane sapphire substrate is (0001) [1 1 00] || (0001) [11 2 0], and that between the ZnO thin film and the r-plane sapphire substrate is (11 2 0) [1 1 00] || (01 1 2) [11 2 0]. The c-axis-oriented ZnO thin film has a columnar structure, whereas the a-axis-oriented ZnO thin film has a single domain-like structure and a significantly flat surface. The thermal conductivity of the c-axis-oriented ZnO thin film is in the range of 18-24 W m -1 K -1 , whereas for the a-axis-oriented ZnO thin film, it is in the range of 24-29 W m -1 K -1 . For the c-axis-oriented ZnO thin films, the phonon scattering on both the out-of-plane and in-plane grain boundaries affects the thermal conductivity. In contrast, the thermal conductivity of the a-axis-oriented ZnO thin films decreases with the decrease of the film thickness. The distribution of the normalized cumulative thermal conductivity of the a-axis-oriented ZnO thin films suggests that the heat transport carrier mostly consists of phonons with the mean free paths between 100 nm and 1 μm.

元の言語English
記事番号035101
ジャーナルJournal of Applied Physics
125
発行部数3
DOI
出版物ステータスPublished - 2019 1 21
外部発表Yes

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zinc oxides
sapphire
thermal conductivity
grain size
thin films
mean free path
flat surfaces
radio frequencies
magnetron sputtering
phonons
film thickness
grain boundaries
heat

ASJC Scopus subject areas

  • Physics and Astronomy(all)

これを引用

Thermal conductivity of hetero-epitaxial ZnO thin films on c - And r -plane sapphire substrates : Thickness and grain size effect. / Yamashita, Yuichiro; Honda, Kaho; Yagi, Takashi; Jia, Junjun; Taketoshi, Naoyuki; Shigesato, Yuzo.

:: Journal of Applied Physics, 巻 125, 番号 3, 035101, 21.01.2019.

研究成果: Article

Yamashita, Yuichiro ; Honda, Kaho ; Yagi, Takashi ; Jia, Junjun ; Taketoshi, Naoyuki ; Shigesato, Yuzo. / Thermal conductivity of hetero-epitaxial ZnO thin films on c - And r -plane sapphire substrates : Thickness and grain size effect. :: Journal of Applied Physics. 2019 ; 巻 125, 番号 3.
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