Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz

Ko Hei Sano, Rei Karasawa, Takahiko Yanagitani

研究成果: Conference contribution

抄録

Large piezoelectricity in 43% Sc doped ScAlN thin film has been recently reported. The thickness extensional mode resonant frequency, where ultrasonic generation efficiency become large, is inversely proportional to the thickness of films. Bulk ScAlN thick plates are attractive for the low frequency and high power ultrasonic applications such as actuators and medical ultrasonics because ScAlN possess lower mechanical and dielectric losses compared with well-used PZT. The thick ScAlN films, however, has not been reported. The electromechanical coupling coefficient kt2 was determined to be 19% using the thickness extensional mode at 81 MHz. This frequency is extremely low compared to well-reported ScAlN thin films in the GHz ranges.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ862-865
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7 26
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域Taiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • 化学的な安全衛生
  • 器械工学
  • 電子工学および電気工学

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