Thickness shear mode epitaxial (10-12) LiNbO3(11-20) AZO/(10-12) Al2O3BAW resonator

Shinya Kudo*, Takahiko Yanagitani

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

LiNbO3 have been used for the SAW filters because of their high Q and k. However, LiNbO3 films have not used in the BAW industry because thickness extensional mode kt2 in the c-axis oriented LiNbO3 films, which can be grown in the standard sputtering process, is significantly low compared with quasi-shear mode k352 in the 168° Ycut LiNbO3. Therefore, the mechanical thinning of bulk LiNbO3 single crystal plate has been used to fabricate the thin single crystalline layer for BAW resonators. In this study, we demonstrate the epitaxial growth of (10-12) LiNbO3 on epitaxial (11-20) Al doped conductive ZnO layer (AZO)/(10-12) Al2O3 substrate. Thickness shear mode acoustic properties of the resonator were reported.

本文言語English
ホスト出版物のタイトルIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
出版社Institute of Electrical and Electronics Engineers Inc.
ページ52-55
ページ数4
ISBN(電子版)9781665468312
DOI
出版ステータスPublished - 2022
イベント1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022 - Munich, Germany
継続期間: 2022 7月 182022 7月 20

出版物シリーズ

名前IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022

Conference

Conference1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
国/地域Germany
CityMunich
Period22/7/1822/7/20

ASJC Scopus subject areas

  • 計算力学
  • 電子工学および電気工学
  • 材料力学
  • 電子材料、光学材料、および磁性材料
  • 音響学および超音波学

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