Thin film stack transducer for simultaneous generation of longitudinal and shear waves at same frequency

Takahiko Yanagitani*, Takuya Matsuo, Mami Matsukawa, Watanabe Yoshiaki

*この研究の対応する著者

研究成果: Conference contribution

7 被引用数 (Scopus)

抄録

It is difficult to generate longitudinal and shear bulk waves simultaneously at same frequency. In this study, we propose new film stack transducer structure consisting of two layers of c-axis 23°-tilted ZnO films. The upper layer and lower layer in the stack have same thicknesses, and the c-axis tilt direction in the both layers are symmetric with respect to the film surface normal. This film stack transducers were fabricated on silica glass substrate by using RF magnetron sputtering technique. Crystallographic properties of the transducer were determined by XRD pole figure analysis. Detailed conversion loss characteristics of the transducer were also discussed. Simultaneous generation of both waves at same frequency was then experimentally demonstrated in the VHF range. We also included thin film fabrication technique for obtaining two layers of c-axis-tilted ZnO films with good crystalline orientation.

本文言語English
ホスト出版物のタイトル2007 IEEE Ultrasonics Symposium Proceedings, IUS
ページ1874-1877
ページ数4
DOI
出版ステータスPublished - 2007 12 1
外部発表はい
イベント2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
継続期間: 2007 10 282007 10 31

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷版)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
国/地域United States
CityNew York, NY
Period07/10/2807/10/31

ASJC Scopus subject areas

  • 音響学および超音波学

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