TY - JOUR
T1 - Three-dimensional silicon fabrication using microloading effects with a rectangular aperture mask
AU - Takahata, Tomoyuki
AU - Iwase, Eiji
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2010/6/29
Y1 - 2010/6/29
N2 - Three-dimensional silicon fabrication is demanded in optical lenses for collecting far infrared radiation. We propose a method for the fabrication of shapes, which have depths varying in the x and y directions, vertical walls and smooth surfaces. A mask design with rectangular apertures was used in a two-stage etching process consisting of anisotropic etching to rough out the three-dimensional shape followed by isotropic etching to smooth the surface. The relationship between the etching depth and area and the aspect ratio (length-to-height ratio) of the rectangular apertures was determined experimentally. Based on this relationship, we describe a procedure for designing rectangular apertures. We fabricated a convex microlens with a diameter of 150 μm and a height of 4.3 μm surrounded by a vertical wall. The arithmetic mean surface roughness of the microlens was 100 nm.
AB - Three-dimensional silicon fabrication is demanded in optical lenses for collecting far infrared radiation. We propose a method for the fabrication of shapes, which have depths varying in the x and y directions, vertical walls and smooth surfaces. A mask design with rectangular apertures was used in a two-stage etching process consisting of anisotropic etching to rough out the three-dimensional shape followed by isotropic etching to smooth the surface. The relationship between the etching depth and area and the aspect ratio (length-to-height ratio) of the rectangular apertures was determined experimentally. Based on this relationship, we describe a procedure for designing rectangular apertures. We fabricated a convex microlens with a diameter of 150 μm and a height of 4.3 μm surrounded by a vertical wall. The arithmetic mean surface roughness of the microlens was 100 nm.
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U2 - 10.1088/0960-1317/20/7/075022
DO - 10.1088/0960-1317/20/7/075022
M3 - Article
AN - SCOPUS:77953878423
VL - 20
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 7
M1 - 075022
ER -