Tip characterizer for atomic force microscopy

Hiroshi Itoh*, Toshiyuki Fujimoto, Shingo Ichimura

*この研究の対応する著者

研究成果: Article査読

64 被引用数 (Scopus)

抄録

A tip characterizer for atomic force microscopy (AFM) was developed based on the fabrication of multilayer thin films. Comb-shaped line and space (LS) and wedge-shaped knife-edge structures were fabricated on a GaAs substrate. GaAsInGaP superlattices were used to control the width of the structures precisely, and selective chemical etching was used to form sharp edges on the nanostructures. The minimum size of the LS structure was designed to be 10 nm, and the radius of the knife edge was less than 5 nm. These nanostructures were used as a well-defined tip characterizer to measure the shape of a tip on a cantilever from line profiles of AFM images.

本文言語English
論文番号103704
ジャーナルReview of Scientific Instruments
77
10
DOI
出版ステータスPublished - 2006
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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