Transparent conductive Nb-doped TiO 2 films deposited by reactive dc sputtering using Ti-Nb alloy target, precisely controlled in the transition region using impedance feedback system

Nobuto Oka, Yuta Sanno, Junjun Jia, Shin Ichi Nakamura, Yuzo Shigesato

研究成果: Article査読

19 被引用数 (Scopus)

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「Transparent conductive Nb-doped TiO <sub>2</sub> films deposited by reactive dc sputtering using Ti-Nb alloy target, precisely controlled in the transition region using impedance feedback system」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy