Transparent crosslinked PTFE mold fabrication and nano-/micro-pattern transfer to photo-curable resin

Akinobu Kobayashi, Tomoko Gowa Oyama, Akihiro Oshima, Seiichi Tagawa, Masakazu Washio

研究成果: Article査読

抄録

Nano-/micro-scale structures of transparent crosslinked polytetrafluoroethylene (RX-PTFE) mold have been fabricated by combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). The nano-/micro-fabricated RX-PTFE were attempted to be applied for the transparent polymer molds of UV nanoimprint lithography (NIL). The ability of the RX-PTFE mold for UV-NIL was evaluated by the imprinted patterns. The RX-PTFE molds and the imprinted structures obtained by UV-NIL were observed by a field emission scanning electron microscope (FE-SEM). As a result, imprinted structures of photo-curable resin (Trimethylolpropane-triacrylate: TMPTA) by UV-NIL using RX-PTFE mold were successfully obtained. The nano-scale L&S patterns, square (410 nm × 410 nm) and hole (Φ{phonetic} 170 nm) array patterns were clearly obtained.

本文言語English
ページ(範囲)217-221
ページ数5
ジャーナルJournal of Photopolymer Science and Technology
25
2
DOI
出版ステータスPublished - 2012

ASJC Scopus subject areas

  • ポリマーおよびプラスチック
  • 有機化学
  • 材料化学

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