We report on the structure difference in YBaCuO films deposited on MgO(001) and mirror polished polycrystalline YSZ substrates. The critical current density of the film on polycrystalline YSZ is two orders lower than that on MgO(001). To improve this Jc value, the substrate with relief structure was employed. This relief modification of substrate surface was found to be effective in controlling the in-plane alignment of the film grains deposited on it.
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