Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama*, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.

本文言語English
ホスト出版物のタイトルMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
ページ619-622
ページ数4
DOI
出版ステータスPublished - 2010 6 1
外部発表はい
イベント23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
継続期間: 2010 1 242010 1 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
国/地域China
CityHong Kong
Period10/1/2410/1/28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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