Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

Shuji Yamamoto, Atsuo Kawana, Chitoshi Masuda

研究成果: Article

11 引用 (Scopus)

抜粋

Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.

元の言語English
ページ(範囲)457-464
ページ数8
ジャーナルSurface and Coatings Technology
236
DOI
出版物ステータスPublished - 2013 12 15

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

フィンガープリント Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用