抄録
A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.
| 本文言語 | English |
|---|---|
| ページ（範囲） | L2279-L2280 |
| ジャーナル | Japanese journal of applied physics |
| 巻 | 28 |
| 号 | 12 A |
| DOI | |
| 出版ステータス | Published - 1989 12月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 工学（全般）
- 物理学および天文学（全般）