Tunneling acoustic microscope

Keiji Takata, Jiro Yugami, Tsuyoshi Hasegawa, Sumio Hosaka, Shigeyuki Hosoki, Tsutomu Komoda

研究成果: Article査読

11 被引用数 (Scopus)

抄録

A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.

本文言語English
ページ(範囲)L2279-L2280
ジャーナルJapanese journal of applied physics
28
12 A
DOI
出版ステータスPublished - 1989 12月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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