Ultra-Low Resonance Frequency Mems Gravimeter with Off-Resonance Closed-Loop Control

Mathematics

• Closed-loop 12%
• Closed-loop Control 82%
• Closed-loop System 12%
• Demonstrate 6%
• Low Frequency 66%
• Micro-electro-mechanical Systems 16%
• Monitoring 11%
• Null 10%
• Resonance Frequency 91%
• Simulation 7%
• Stiffness 63%
• Temperature Dependence 17%
• Tuning 27%
• Voltage 13%

Physics & Astronomy

• electric potential 6%
• feedback control 12%
• gravimeters 87%
• microelectromechanical systems 11%
• sensitivity 6%
• simulation 4%
• stiffness 50%
• temperature dependence 7%
• tuning 17%

Engineering & Materials Science

• Closed loop systems 10%
• Electric potential 5%
• Gravimeters 100%
• MEMS 10%
• Monitoring 6%
• Stiffness 39%
• Temperature 4%
• Tuning 17%