抄録
An ultrahigh vacuum atomic force microscope (UHV-AFM) with tunneling current detection has been developed. This microscope uses a new type of pantograph inchworm system. The features of the inchworm system are (i) operation of the clamp in normal clamping mode, (ii) an enlargement of the piezo device stroke for clamper stroke, and (iii) compact system for easy use. Our UHV-AFM has (i) six inchworm movements based on the new mechanism, and (ii) a sharp AFM probe whose tip is machined by a focused ion beam fabrication technique. UHV pressure experiments demonstrate that this system provides a contamination-free surface and can observe atomic resolution AFM images of MoS2 and silicon carbide.
本文言語 | English |
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ページ(範囲) | 3524-3529 |
ページ数 | 6 |
ジャーナル | Review of Scientific Instruments |
巻 | 64 |
号 | 12 |
DOI | |
出版ステータス | Published - 1993 |
外部発表 | はい |
ASJC Scopus subject areas
- 器械工学